【作者】 顾艳； 李俊； 伍瑞新；

【机构】 南京大学电子科学与工程学院；

【摘要】 本文设计并制作了一个基频为500MHz的带线谐振腔,用于测量薄膜材料在微波段的电磁参数。运用谐振腔的微扰理论导出电磁参数的反演公式,讨论了精确测量的样品尺寸要求,并对由测量系统引起的品质因素的测量误差进行修正。实验中,测量了聚酰亚胺薄膜、镀金薄膜的介电常数以及磁性薄膜的磁导率,测量结果和其他技术所测得的结果吻合。更多还原

【Abstract】 A stripline cavity with basic resonance frequency as 500 MHz was designed and fabricated to measure dielectric and magnetic properties of films at microwave frequencies. Basing on the perturbation theory,the permittivity and permeability of films can retrieved from the changes of the measured quality factor and frequency shift of the cavity with samples. A guideline on the shape of specimen was proposed for accurate measurement. And the error of Q factor caused by the measurement system was corrected.Both permittivity and permeability of different samples were measured,including dielectric polyimide film,metallic nano-film,ferromagnetic film. The experimental results are comparable with those gained by other techniques.更多还原