【作者】 李梓萱； 王浩；

【Author】 LI Zi-xuan;WANG Hao;Tongji Institute of Acoustics;

【机构】 同济大学声学研究所；

【摘要】 薄层材料在医学、微电子、汽车和航空航天工业中有着广泛应用,对薄层材料的无损表征具有重要的意义。本文提出了一种基于超声相控阵测量薄层材料参数的检测方法。首先计算声波在薄层中的反射系数,并分析反射系数与薄层材料参数的关系,以及入射波频率、角度等对反射系数的影响。其次,对换能器阵列产生的平面波声场进行建模仿真,分析发射和接收信号,结合理论计算的反射系数,反演得出待测材料的声速、厚度等参数,以此为基础确定反演方法。最后,使用该方法对钢等薄层材料进行测量,所得结果与传统方法得出的数据对比,验证了该方法的可行性。更多还原

【Abstract】 With the extensive application of thin layer materials in the fields of medicine, microelectronics, automobile and aerospace industry, it is of great significance for the nondestructive testing of thin layer materials. To meet the engineering requirements, this study presents a method to determine the parameters of thin layer materials based on ultrasonic phased array. Firstly, the propagation characteristics of sound waves in the thin layer are studied, and the relationship between the reflection coefficient and the parameters of the thin layer material and the influence of the frequency and angle of the incident wave on the reflection coefficient are analyzed. Secondly, the plane wave field of the transducer array is modeled and simulated. Combining the theoretical reflection coefficient, the parameters of the longitudinal and transverse velocity and thickness of the material are obtained. Finally, the method is used to measure the thin layer of steel. The results are compared with the data obtained by the traditional method, and the feasibility of the method is verified.更多还原