【作者】 张涵璐； 汤现武； 戴建明； 朱雪斌； 孙玉平；

【Author】 Zhang Hanlu;Tang Xianwu;Daijianming;Zhu xuebin;Sunyuping;Key Laboratory of Materials Physics,Institute of Solid State Physics;High Magnetic Field Laboratory,CAS;

【机构】 中国科学院固体物理研究所材料物理重点实验室； 中国科学院强磁场科学中心；

【摘要】 高磁化强度的CoFe合金广泛应用于微电子器件的设计和开发。我们采用能够低成本、大面积制备薄膜的化学溶液沉积方法（CSD）,并在不同强度的强磁场下制备了Co₇₀Fe₃₀薄膜,通过对薄膜的微结构、磁性能系统研究,观察到强磁场下制备的Co₇₀Fe₃₀薄膜呈现较小的晶粒尺寸,较高的致密性和较大的饱和磁化强度。薄膜中缺陷的降低导致了磁性能显著增。为今后进一步开展强磁场下其它合金薄膜制备与研究奠定了一定基础.更多还原

【Abstract】 CoFe alloy with high magnetization and high Currie temperature has been widely used in microelectronic device.As one of ways to synthesis films within large scale and low cost,chemical solution deposition（CSD） was used herein to prepare the thin Co₇₀Fe₃₀ films annealed with different high magnetic fields.It is observed that the high magnetic annealed Co₇₀Fe₃₀ thin films exhibit small grain size,decreased films thickness,improved films density,and increased magnetization.The improved films microstructure indicating the magnetic annealing benefits the films crystallization.The increased magnetic properties are the results of the decreased defects of micropore as well as the improved crystallization.更多还原