【作者】 贾嘉； 李向阳； 侯云； 黄志明； 蔡愚；

【Author】 JIA Jia;LI Xiang-Yang;HOU Yun;HUANG Zhi-Ming;CAI Yu;State Key Laboratory of Transducer Technology, Shanghai Institute of Technical Physics,Chinese Academy of Sciences;Key Laboratory of infrared Imaging Materials and Detectors,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics,Chinese Academy of Sciences;Thermistor detector group, Shanghai Institute of Technical Physics,Chinese Academy of Sciences;

【机构】 中国科学院上海技术物理研究所传感技术国家重点实验室； 中国科学院上海技术物理研究所中科院红外成像材料与器件重点实验室； 中国科学院上海技术物理研究所红外物理国家重点实验室； 中国科学院上海技术物理研究所热敏组；

【摘要】 红外地平仪是卫星姿态控制系统的重要设备之一,而热敏电阻红外探头是红外地平仪的一个关键部件,它的质量直接影响着地平仪的性能和可靠性。随着近代空间技术的发展和下一代红外地平仪的需求,对研制高可靠、长线列的红外热敏探测器的要求日益迫切。近年来,人们发展的化学溶液法在制备锰钴镍氧(Mn-Co-Ni-O或MCN)薄膜材料方面取得了突破,其致密性远远超过陶瓷体材料,为长寿命、高可靠性的热敏器件提供了一个很好的解决方案。而MCN薄膜型探测器的类微电子制备技术也为实现研制长线列的多元热敏探测器奠定了基础。本文中用微电子工艺制作了地平仪用的锰钴镍薄膜型红外热敏探测器,并对其中的一些关键工艺诸如:刻蚀和退火等做了有益的研究。这些新工艺新方法对于薄膜热敏红外探测器在我国空间观测和遥感技术领域中的工程应用,提高红外地平仪可靠性和使用寿命都有着重要的意义。更多还原

【Abstract】 The thermistor infrared detector is one of the most important devices of the infrared horizon sensor which is a key control unit of satellite attitude control systems. Its quality is directly related to the performance and reliability of the horizon sensors. By now, the space technology is progressing at a rapid rate. The infrared thermistor resistor of high performance and long linear arrays is in great need of the next generation of horizon sensors. In recent years, researchers have made a great progress in synthesizing Mn-Co-Ni-O(MCN) thin films by a novel chemical solution deposition(CSD) method. The compactness of Mn-Co-Ni-O thin films show surpassing quality to that of sintering ceramic materials. It makes it possible to prepare thermistor infrared detectors of long life and high reliability. Furthermore, many similarities of preparation technology between MCN thin film detectors and microelectronics devices provide a basis for fabricating long thermistor detector arrays. In this paper, we prepare high quality thermistor infrared detectors of Mn-Co-Ni-O thin film for horizon sensors by microelectronics processes, and we investigate some key processing technologies such as etching, annealing and so on. After this research, we can get some new and optimized processes for the engineering use of Mn-Co-Ni-O thin film thermistor detectors. It has proved an important significance to the using of thin film thermistor detectors in space surveying and remote sensing, as well as improving the reliability and lifetime of horizon sensors.更多还原