【作者】 佟建华； 白银； 边超； 夏善红；

【Author】 Jianhua Tong;Yin Bai;Chao Bian;Shanhong Xia;State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences;

【机构】 中国科学院电子学研究所传感技术国家重点实验室；

【摘要】 本文介绍了一种基于纳米修饰表面微电极的电化学微型传感器,并用于营养化水质中总磷的检测。采用微加工技术制备了带有微型电极的传感器芯片,并在工作电极上采用电化学沉积的方法制备钴敏感材料。采用不同的电沉积参数对敏感膜的形貌、电化学特性进行了研究。通过恒电流电镀的方法修饰的钴薄膜具有鳞片状纳米微结构,鳞片尺寸大约为70nm×2μm,该鳞片状纳米钴材料对磷酸根具有较好的电化学响应,该微电极对磷酸根溶液在10-6mol/L到10-2mol/L浓度范围内有线性响应,灵敏度为-23.1m V/dec,分辨率为3×10-6mol/L,可以满足Ⅱ类水到Ⅴ类水的检测要求。更多还原

【Abstract】 This article presents a cobalt nanostructure-based microsensor for phosphate detection in water. Gold film micro electrodes were fabricated by MEMS technology, and cobalt film was electroplated on the gold electrodes by fix current method. Cobalt thin films with plane, nano-scale structures were obtained. The test results showed that the cobalt film obtained by this method had spam-like structure, and the dimension of the spasm was about 70nm×2um. Electrochemical characterization of these microelectrodes was performed. The electrodes present a linear response in the range from 10-6mol/L to 10-2mol/L with a slope of-23.1m V/decade. The resolution is 3×10-6mol/L. The result shows that this microsensor could be used to detect the concentration of phosphate in class II to V water.更多还原