【作者】 杨亚军； 陈磊； 钱林茂；

【Author】 YANG Ya-jun;CHEN Lei;QIAN Lin-mao;Tribology Research Institute,School of Mechanical Engineering,Southwest Jiaotong University;

【机构】 西南交通大学机械工程学院摩擦学研究所；

【摘要】 原子力显微镜是研究材料表面微观摩擦磨损及其防护问题的重要工具之一。然而,现有的原子力显微镜只能实现普通大气和真空两种环境气氛,仍缺乏对其它混合环境气氛的有效控制。设计的环境气氛控制系统能够精确控制气体的相对流量,为原子力显微镜的环境腔提供不同分压的环境气氛,如不同比例的乙醇和水分混合气氛等。该系统不仅可以应用于原子力显微镜,为材料表面的微观摩擦磨损及其防护研究提供各种混合的气氛环境,也能够用于其它相关设备的环境气氛控制。更多还原

【Abstract】 Atomic Force Microscopy(AFM) has become an important tool to investigate the friction,wear and protection issues of material surface at nanoscale.However,the existing AFM normally can only provide two kinds of basic control atmosphere,namely air and vacuum.It still lacks the effective control method to obtain the environmental atmosphere with mixed gas.In this paper,a new atmosphere control system was designed for AFM,which can accurately control the relative flow of gas and inject the mixed gas with different partial pressure in AFM environmental chamber,such as the mixed gas of ethanol and water in different proportions.The system can not only provide the mixed gas in AFM chamber to study the friction,wear and protection issues of material at nanoscale,but also can be used in other similar devices for atmosphere controlling.更多还原