【作者】 韦春贝； 代明江； 龚才； 侯惠君； 林松盛；

【Author】 Wei Chunbei;Dai Mingjiang;Gong Cai;Hou Huijun;Lin Songsheng;Guangzhou Research Institute of Non-ferrous Metals;

【机构】 广州有色金属研究院新材料研究所；

【摘要】 类金刚石(DLC)膜是一类性能非常类似于金刚石的非晶碳膜,它具有高硬度、低摩擦系数、高弹性模量、高电阻率、良好的声学性能、高的红外透过率等,是一种非常有前途的材料,目前已开始得到广泛的应用。然而膜/基结合力差、膜内应力高等是影响DLC膜性能的首要问题,这些问题导致沉积的DLC膜在使用过程中容易导致薄膜剥落而失效。过渡层的设计和优化是提高DLC膜/基结合力的关键。本实验采用离子源辅助磁控溅射沉积的方法,在不同的基体上制备DLC膜,研究过渡层沉积工艺、基体材料等因素对膜/基结合力的影响。采用扫描电子显微镜(SEM)、金相显微镜对薄膜的微观形貌进行研究,利用显微硬度仪、划痕仪对薄膜的力学性能进行分析。结果表明,不同的基体材料与过渡层材料的选择有重要关系,并且过渡层厚度对膜/基结合力产生重要的影响,文中对DLC薄膜的剥落过程进行了详细的探讨。更多还原

【Abstract】 Diamond-like-carbon(DLC) film is a kind of amorphous carbon film whose characteristic is very similar to that of diamond. As a promising material DLC has high hardness, low friction coefficient, high Young’s modules, high electrical resistivity, good acoustic properties and high infrared permeation, et al, and it has been widely used in industrial applications. The major disadvantage of DLC film is its relatively low adhesion and high internal stress, which may lead to the peeling off during applications. In order to overcome this problem, interlayer between the DLC film and the substrate material is necessary. In this experiment, ion source assistant magnetron sputtering method was used to deposited DLC films on different substrates. Influence of deposition parameters and substrate materials on the adhesion of DLC films was investigated. Scanning electron microscope(SEM) and metallographic microscope were utilized to analyze the microstructure. Hardness and adhesion of DLC films were examined by Vickers indentation tester and a scratch tester respectively. The results show that there is an important relationship between the substrate materials and interlayer materials. The thickness of interlayer also has obvious influence on the adhesion of DLC films. The peeling off process of DLC films was also discussed in detail.更多还原