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截止蓝光镀膜玻璃的溅射法制备与性能研究
Preparation and characterization of the blue-light-shielding glass coated by magnetron sputtering
【作者】 刘旭; 赵青南; 罗乐平; 王燕芳; 杨振; 董玉红; 赵杰;
【机构】 武汉理工大学硅酸盐建筑材料国家重点实验室; 江苏秀强玻璃工艺股份有限公司;
【摘要】 设计了达到截止蓝光目的的膜系,并采用磁控溅射镀膜工艺,以TiO2和SiO2作为介质膜,通过优化工艺参数,在玻璃基片成功制备了具有截止蓝光特性的功能复合薄膜。用XPS表征了TiO2薄膜中Ti元素价态以及化学计量比,用NKD-7000分析了薄膜的光学参数,用FTIR分析了SiO2薄膜的结构,采用FESEM分析薄膜表面形貌,用紫外-可见光谱仪测试了复合膜选择性透过的特性,分析了影响截止蓝光镀膜玻璃性能的因素。镀膜玻璃的蓝光截止率达到98%,大于蓝光波长的光谱透射率达到90%。
【Abstract】 The composite films with the properties of shielding blue light were designed using TiO2 and SiO2 composite films,and successfully deposited on the glass substrates via magnetron sputtering.The valence and stoichiometric ratio of the TiO2 film were characterized by X-ray photoelectron spectroscopy(XPS).The structure of the SiO2 films were detected using Fourier transform infrared spectroscopy(FTIR).Surface morphology of the films were identified by Field emission scanning electron microscope(FESEM).The optical parameters and selective transmission of the composite films were analyzed with NKD-7000 spectrophotometer and ultraviolet-visible spectrometer,respectively.The obtained results show that,98%of the the blue-light was shielded by the coated glass in the visible light region and spectral transmittance more than 500 nm wavelength was up to 90%.
【Key words】 blue-light-shielding; coated glass; TiO2 and SiO2 composite films; magnetron sputtering;
- 【会议录名称】 2015年全国玻璃科学技术年会论文专集
- 【会议名称】2015年全国玻璃科学技术年会
- 【会议时间】2015-04-11
- 【会议地点】中国江苏宿迁
- 【分类号】TQ171.1
- 【主办单位】中国硅酸盐学会玻璃分会、宿迁市宿豫区人民政府