【作者】 刘新； 高倩； 王慷慨； 刘涌； 刘军波； 宋晨路； 韩高荣；

【Author】 LIU Xin;GAO Qian;WANG Kang-kai;LIU Yong;LIU Jun-bo;SONG Chen-lu;HAN Gao-rong;State Key Laboratory of Silicon Materials and School of Materials Science and Engineering,Zhejiang University;Key Laboratory of Advanced Materials and Applications for Batteries of Zhejiang Province;Hangzhou Blue star New Materials Technology Co.,Ltd.;

【机构】 浙江大学材料科学与工程学系硅材料国家重点实验室； 浙江省电池新材料与应用技术研究重点实验室； 杭州蓝星新材料技术有限公会司；

【摘要】 以四异丙醇钛为前驱体,采用浮法在线常压化学气相沉积（APCVD）法大面积均匀制备了TiO₂透明易清洁薄膜。运用X射线衍射、场发射扫描电镜、原子力探针显微镜、透射电子显微镜、椭偏仪等测试方法研究了不同前驱体浓度对TiO₂薄膜微结构、可见光透过率和光诱导亲水性的影响规律。研究结果表明TiO₂薄膜只存在锐钛矿相,前驱体浓度在0.44%¹.76%之间,随着前驱体浓度的提高,薄膜的结晶性能逐渐提高,薄膜厚度逐渐增加,光诱导亲水性逐渐增强。当前驱体浓度为1.76%时,薄膜结晶性能最好,可见光透过率大于60%,经过紫外光照射两小时,接触角降为3.7°,具有超亲水性。更多还原

【Abstract】 In this article,large-scale homogeneous transparent self-cleaning TiO₂ thin films were prepared by atmosphere pressure chemical vapor deposition method on an industrial production line using Titanium（IV） isopropoxide as the precursor.XRD,SEM,AFM,TEM and spectroscopic ellipsometry were employed to investigate the micro-nano structure,visual transmittance and light induced hydrophilicity of the TiO₂ film depended on different precursor concentration.It was founded that there was only anatase in the films which were of good crystallinity.The crystallinity and light induced hydrophilicity of the film became better with the increasing of the precursor concentration between 0.44%to 1.76%and the films increased the thickness.The film with 1.76%precursor concentration were of the best crystallinity.Its visual transmittance was more than 60%.After 2 hours UV irradiation,the water contact angle of the film decreased to 3.7 degrees resulting the super-hydrophilicity property.更多还原