【作者】 游锦山； 陈长琦； 汪根生； 林胜；

【机构】 合肥工业大学；

【摘要】 PECVD温度控制系统的精确性和稳定性对获得结构稳定和性能优良的半导体薄膜材料非常重要。本文基于西门子S7-300可编程控制器(PLC)为控制核心,搭配触摸屏为人机交换界面(HMI),论述了PECVD温度控制系统的设计。PLC与HMI基于MPI协议实现通信功能,采用WinCCflexible组态友好的控制界面,完成数据输入/输出、参数修改、实时监控和报警联锁。以STEP7为程序设计平台,在定时中断组织模块(OB35)中循环调用标准温度功能块(FB58)编程实现对温度的PID闭环控制,扩展PLC模拟量输入模块SM331对热电阻标准模拟信号实现A/D转换,结合FB58集成的脉宽调制输出功能,将PID运算结果转换成脉冲占空比控制固态继电器执行加热动作。该系统提高了PECVD温度控制的自动化水平,并有效缩短控制回路的调节时间,减小超调量,确保了温度的准确控制和系统的稳定运行。更多还原

【Abstract】 The accuracy and stability of PECVD temperature control system are very important to get semiconductor film materials with stable structure and excellent performance.This essay elaborated the temperature control system’s design taking Siemens S7-300 programmable controller(PLC)and Man-machine interface(HMI)as the core.PLC communicates with HMI function based on MPI protocol,and designing a friendly control interface with WinCC flexible to achieve data input/output,Change parameter,real time monitoring and alarm interlocking.Calling standard temperature function block(FB58)in timer interrupt organization module(OB35)with STEP 7 software platforms to realize PID closed-loop control.Then expanding analog input module(SM331)to convert standard analog signal of thermal resistance into digital form.Using FB58 can transform PID operation results into pulse duty cycle to control Solid State Relays.This system has improved the automation level of PECVD temperature control,and shortened the regulation time of control loop and overshoots to ensure the accuracy of the temperature control and the stable operation of the system.更多还原