【作者】 杨鹏； 伍凡； 侯溪；

【Author】 YANG Peng1,2,Wu Fan1,Hou Xi1(1.Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;2.Graduate school of Chinese Academy of Sciences,Beijing 100049,China)

【机构】 中国科学院光电技术研究所； 中国科学院研究生院；

【摘要】 绝对检测技术因可将系统误差中检测结果中分离,从而被越来越多的用于高精度的面形检测。三位置绝对检测技术因其检测过程简单,因此常被用于球面元件的检测。但三位置球面绝对检测技术存在对位置调整误差比较敏感的缺点。因此本文提出多位置平均检测技术,来降低位置调整误差对检测结果的影响。并利用实验对一口径为80mm,F数为1.1的球面元件利用两种方法检测对比检测。检测结果表明:多位置平均检测技术可有效降低位置调整误差对检测结果的影响。更多还原

【Abstract】 Due to absolute measurement technique can separate the system error from the test results,which are more and more applying to high-precision surface shape testing.For the testing process of three-position measurement technique is simple;it is often used for the measurement of spherical components.But three-position measurement technique is more sensitive to the error of adjustment.Therefore,the average of multi-location technique was proposed,which can reduce the influence of the error of adjustment.A spherical component which diameter is 80mm and F number is 1.1 was used to testing by the two technique.Test results showed that: multi-position average measurement technology can effectively reduce the influence of the error of adjustment.更多还原