【作者】 唐伟忠； 于盛旺； 李成明； 陈广超； 吕反修；

【Author】 TANG Wei-zhong,YU Shen-wang,LI Cheng-ming,CHEN Guang-chao,LV Fan-xiu(University of Science and Technology Beijing,Beijing 100083,China)

【机构】 北京科技大学材料科学与工程学院；

【摘要】 在众多的红外光学窗口材料中,金刚石拥有众多优异性能的组合,因而受到了人们的广泛关注。自上世纪80年代化学气相沉积方法制备金刚石膜的技术开始取得进展以后,以金刚石膜制作红外光学窗口的设想就被提了出来,并在国际范围内广泛开展了相关材料制备技术的研究。到目前为止,美、英、德等西方国家已经掌握了可用于红外光学窗口的高品质金刚石膜的制备技术。与此同时,我国高品质金刚石膜的制备技术也已取得了长足的进展。文中将对目前国内外金刚石膜红外光学窗口材料的制备技术进行简要的介绍,并重点讨论我国高品质金刚石膜材料制备技术近年来取得的进展。更多还原

【Abstract】 Among the various types of infrared window materials,diamond possesses a combination of unique physical properties.With the development of plasma chemical vapor deposition technology in the last centuray,diamond wafers has appeared as a promising material for fabrication of infrared windows.Up until now,western countries have developed techniques to deposit large area,high quality diamond wafers.At the same time,great progress has also been made in China to produce diamond wafers useful as optical window materials.In this article,we present a review on techniques aimed at producing diamond wafers useful for infrared windows,and special attention will be given to the recent progress made to produce high quality diamond wafers.更多还原