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用于CCD几何量测试的高倍率长工作距显微物镜设计
Designed to high-magnification long-working distance microscope objectives for testing geometrical of CCD
【Author】 MA Hong-tao,HAN Bing,ZHANG Xiao-hui(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)
【机构】 中国科学院长春光学精密机械与物理研究所;
【摘要】 高倍率显微物镜一般工作距离只有零点几毫米,由于这一局限性,很多需要用到高倍率显微物镜的测试的场合都无法顺利完成。所以在一定的测试场合,例如CCD几何量测试时高倍率显微物镜工作距离的加长显得非常关键。文中分别从用途和数值孔径两种角度对显微镜进行了分类,结合两种分类的特点。选择了用于CCD几何量测试的高倍率显微物镜的初始结构,对其进行了复杂化,最终设计了一个β=40x、NA=0.7、工作距离为5mm的显微物镜。并分别从几何像差、传递函数、点列图、能量曲线评价了这一物镜的成像质量。
【Abstract】 High-magnification microscope objectives work in general is only 0:00 away from a few millimeters,due to this limitation,many high-magnification microscope objectives need to use the occasion of the tests can not be successfully completed.So in a certain test occasions,such as the amount of testing geometry CCD high-rate of the longer working distance microscope objectives are vital.Paper,respectively,from the perspective of two kinds of uses and a numerical aperture of the microscope,have been classified,combined with the characteristics of both classifications.Selected geometrical parameters for the CCD tested high-magnification microscope objectives of the initial structure and to carry out a more complicated,the final design of a,NA = 0.7,working distance of 5 mm of the microscope objectives.Respectively,from the geometrical aberrations,transfer function,point out diagram,the energy curve to evaluate the image quality of this lens.
- 【会议录名称】 2009年先进光学技术及其应用研讨会论文集(下册)
- 【会议名称】2009年先进光学技术及其应用研讨会
- 【会议时间】2009-11-21
- 【会议地点】中国浙江杭州
- 【分类号】TH742
- 【主办单位】中国宇航学会光电技术专业委员会、浙江工业大学