【作者】 翟文权； 李书旗；

【Author】 Zhai wen-quan Li shu-qi (Electronic & Information Technology Experimental Center,Hohai University,Jiangsu Changzhou,213022)

【机构】 河海大学电子信息技术实验中心；

【摘要】 计量光栅是位移动态测量中的一种常用高精度的测量传感器。本文设计了一种光栅全系统动态测量精度分析装置,对不同运动速度下的系统的动态测量精度进行了分析,并分别从平面直线度、空间直线度等多个方面详细讨论了影响系统测量精度的各项误差源及其影响程度。更多还原

【Abstract】 The grating is an ordinary-used,high-accurate instrument in the dynamic measurement of the offset.In this paper, a grating system for the analysis of the whole-system dynamic measuring accuracy is designed.The dynamic measuring accuracy of the system in different velocities is measured and analyzed.Then,the error sources and their effects are discussed from some aspects such as 2D linearity,spatial linearity.更多还原