【作者】 陈志勇； 周斌； 张嵘；

【Author】 Chen Zhiyong Zhou Bin Zhang Rong (Department of Precision Instruments and Mechnology Tsinghua University Beijing 100084 China)

【机构】 清华大学精密仪器与机械学系；

【摘要】 本文介绍了一种MEMS硅谐振梁加速度计的敏感结构设计与加工过程、电路方案和测试结果。敏感结构采用了差动音叉及杠杆增力方案,重点对杠杆结构进行了分析,提出了能够提高增力系数的细颈结构,并优化了杠杆比率。微结构的加工工艺为硅-玻璃键合,体硅深刻蚀工艺。驱动电路采用稳幅自激振荡方案。对整表进行了测试,结果为标度因数为157.5Hz/g,±1g测量范围内的非线性度为0.083%,加速度噪声达到10.51μg/rtHz。更多还原

【Abstract】 The structure fabrication circuit scheme and testing of a MEMS silicon vibrating beam accelerometer was described The sensing structure has 2 differential double-ended tuning forks and levers was utilized to increase the stress in the beams‘Thin neck’link structure was designed to improve the stress ratio and the leverage ratio was optimized The sensor was fabricated by Silicon-on-glass process Amplitude controlled self-oscillating loop was adopted to drive the sensor Test results showed a scale factor of 157.5Hz/g scale factor nonlinearity of 0.083%in±1g measuring range and a noise of 10.51μg/rtHz.更多还原