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电解液组成对电沉积纳米ZnO薄膜结构及性能的影响

Effect of electrolyte on the structure and properties of ZnO films by electrodeposition

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【作者】 秦秀娟孙丽卜丽敏孙学亮左华通韩司慧智

【Author】 Qin xiu-juan,Sun li,Bo li-min,Sun xue-liang,Zuo Hua-tong,Hansi Hui-zhi (Environmental and chemical engineering college,State Key Laboratory of Metastable Materials Technology and Science,Yanshan University,Qinhuangdao 066004)

【机构】 燕山大学环境与化学工程学院燕山大学亚稳材料制备技术与科学国家重点实验室

【摘要】 以硝酸锌水溶液、醇水溶液、表面活性剂op-10水溶液及醇水op-10混合液作电解液,采用阴极恒电流法,在透明导电玻璃(ITO)衬底上沉积制备出了ZnO薄膜。研究了电沉积过程中电解液组分对薄膜的形成、结构和性能的影响。通过对电解液阴极极化曲线、薄膜X射线衍射的分析得出:乙醇和表面活性剂的加入使阴极极化增加,晶粒细化,薄膜内应力减小,薄膜结晶质量提高;原子力显微镜观察显示加入乙醇和表面活性剂后薄膜表面粒径更加均匀,粗糙度减小;光学性能测试表明:添加乙醇和表面活性剂后薄膜在紫外光区的吸收更强且宽泛,吸收峰发生红移,在可见光区的透过率大幅度增加。

【Abstract】 The effect of electrolyte on the formation,structure and properties of ZnO films were studied during the process of electrodeposition,which were carried out in an aqueous Zn(NO32 solution with surfactant op-10 and ethanol on the ITO glass substrate by the use of cathodic galvanostatically deposited technique.The results of cathodic polarization curves and X-ray diffraction showed that the presence of surfactant and ethanol was useful for increase of cathodic polarization,grain refining,reduce stresses in the films and improve crystal quality.Uniform grain and soft roughness of the ZnO films in the presence of surfactant were observed by the use of atomic force microscopy.Optical characterizations showed that such films had high and wide optical absorption in the ultraviolet-visible wavelength range,and its position of the peak shifted to visible range.The samples had high transmittance in the visible range.

【关键词】 电解液电沉积ZnO薄膜阴极极化
【Key words】 ElectrolyteElectrodepositionZnO filmCathodic Polarization
  • 【会议录名称】 2009年全国电子电镀及表面处理学术交流会论文集
  • 【会议名称】2009年全国电子电镀及表面处理学术交流会
  • 【会议时间】2009-11-01
  • 【会议地点】中国上海
  • 【分类号】TB383.2
  • 【主办单位】中国电子学会生产技术学分会电镀专家委员会、上海市电子学会电子电镀专业委员会
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