【作者】 申艳艳； 李旭； 高辉； 李照东； 张丽莉； 张大成； 张晓利； 何伟岩； 袁兵； 刘昌龙；

【Author】 SHEN Yanyan1, LI Xu1, GAO Hui1, LI Zhaodong1, ZHANG Lili1, ZHANG Dacheng1, ZHANG Xiaoli1,HE Weiyan1, Yuan Bing 1, Liu Changlong1,2* , 1School of Science, Tianjin University, Tianjin 300072, P. R. China 2Tianjin Key Laboratory of Low Dimension Materials Physics and Preparing Technology, Institute of Advanced Materials Physics Faculty of Science, Tianjin 300072, P. R. China

【机构】 天津大学理学院物理系； 天津市低维功能材料物理与制备技术重点实验室；

【摘要】 本文利用离子注入的方法将剂量分别为5×1015、1×1016、5×1016、1.0×1017ions/cm2,能量为45keV的Zn离子注入光学级的石英(SiO2)玻璃基片中,在O2气氛围中不同温度下对样品进行退火以促进纳米颗粒的成核与增长。我们采用紫外-可见分光光度计(UV-Vis)、原子力显微镜(AFM)、掠角X射线衍射仪(GXRD)对样品进行测量分析。UV-Vis结果显示,当剂量大于或等于1×1016ions/cm2时,注入层在260nm左右存在一个明显的吸收峰,吸收峰强度随剂量的增加而增加。并且随着退火温度的升高,吸收峰发生蓝移,表明纳米颗粒的尺寸发生了变化。GXRD及AFM结果进一步证明了纳米颗粒的形成及其演变。GXRD的结果显示600℃退火是Zn纳米颗粒演变成ZnO纳米颗粒的阈值温度,800℃退火后Zn和ZnO的纳米颗粒完全消失并完全转化成Zn2SiO4纳米颗粒。更多还原

【Abstract】 SiO2 samples were implanted with 45 keV Zn ions at doses ranging from 5×1015 to 1.0×1017 ions/cm2, and were then subjected to furnace annealing at different temperatures in oxygen atmosphere to promote the fabrication and evolution of the nanoparticles. In the as implanted states, Clear peaks appeared when the dose increased to 1×1016ions/cm2 and the peak intensity increased with the dose. After annealing, peaks descreased and have a blue shift which indicated that the size of the nanoparticles changed. AFM and GXRD confirmed the evolution and fabrication of the nanoparticles. Moreover, the results of the GXRD show that 600℃ is the threshold temperature for the change of Zn nanopaticles to ZnO nanopaticles. When annealed at 800 ℃, all the Zn and ZnO nanopaticles disappeared and translate to Zn2SiO4.更多还原