节点文献
CVD法制备单根磷掺杂P型ZnO纳米线
Preparations and Characteration of single phosphorus-doped p-type ZnO nanowire
【Author】 Gu Leilei,Zheng Kaibo,Sun Dalin,Chen Guorong~* (Department of Materials Science,Fudan University,Shanghai 200433,P.R.China)
【机构】 复旦大学材料科学系;
【摘要】 本文采用化学气相沉积法(CVD)制备了磷掺杂p型ZnO纳米线,并且用扫描电子显微谱(SEM),拉曼谱(RM),X光衍射谱(XRD)以及光致发光谱对其性质进行表征;通过"lift-off"法制备了单根磷掺杂ZnO纳米线的场效应管,并对其电学性质进行表征,纳米线的载流子浓度和迁移率分别为1.51×109cm-1和0.803 cm2/(VS)。
【Abstract】 Phosphorus-doped p-type ZnO nanowires(NWS) were prepared by CVD and characterized with Scanning Electronic Microscope(SEM),Raman Microscope(RM),X-ray diffraction(XRD) and Photo-luminescence Microscope(PL) in this letter.And further,field effect transistor(FET) based on single nanowire was fabricated in"lift-off"mechanism and its electrical property was characterized.The carrier concentration and mobility were estimated to be 1.51×109cm-1 and 0.8 cm2/(VS),respectively.
- 【会议录名称】 第六届华东三省一市真空学术交流会论文集
- 【会议名称】第六届华东三省一市真空学术交流会
- 【会议时间】2009-10-22
- 【会议地点】中国上海
- 【分类号】TB383.1
- 【主办单位】上海市真空学会、江苏省真空学会、安徽省真空学会、浙江省真空学会