【作者】 陈长琦； 汪明明； 张建国； 胡纯栋； 谢远来； 刘智民； NBI组；

【Author】 Chen chang-qi,Wang ming-ming,Zhang Jian-guo (Institute of Vacuum Science and Technology and Equipment,Hefei University of Technology,Hefei 230009,China) Hu chun-dong,Xie Yuan-lai,Liu Zhi-min,NBI team (Institute of Plasma Physics,the Chinese Academy of Sciences,Hefei 230031,China)

【机构】 合肥工业大学真空科学技术与装备工程研究所； 中国科学院等离子体物理研究所；

【摘要】 活性炭是NBI低温吸附泵吸附面的关键组成部分,其性能是决定NBI低温泵抽气性能的关键因素之一。本文选取JX-6型椰壳活性炭,用全自动比表面积及孔径分析仪(ASAP2020)在液氮温度下对其性能进行了测试,并对实验数据进行了分析。实验结果表明,该活性炭具有良好的孔隙结构和较强的吸附性能,其最大吸附量达到252cm3/g STP。为进一步研究NBI低温泵的低温吸附抽气提供了理论依据。更多还原

【Abstract】 Activated carbon is a key component of the cryoadsorption surface of NBI cryoadsorption pump.The capability of activated carbon is one of the most important factors which determine the capability of gas pumping of NBI cryopump.The JX -6 coconut shell charcoal was chosen and then tested by using the automatic surface area and pore size analyzer(ASAP2020) for analysis of its capability under the temperature of liquid nitrogen,and the data were analyzed.The results indicate that the activated carbon has well frame of pore and strong adsorption,the maximum adsorption amount can obtain 252cm3/g STP.The article provides the theoretical basis for further research about adsorption of cryopump in NBI at low temperature.更多还原