【作者】 朱亮； 叶雄英； 冯焱颖； 武雁斌； 周兆英；

【Author】 Zhu Liang 1,2 Ye Xiongying 1,2 Feng Yanying 1,2 Wu Yanbin 1 Zhou Zhaoying 1 (1. State Key Laboratory of Precision Measurement Technology and Instruments, Dept. Precision Instruments & Mechanology, Tsinghua Univ., Bejing, 100084; 2. State Key Laboratory of Transducer Technology Bejing 100084)

【机构】 精密测试技术及仪器国家重点实验室精密仪器与机械学系清华大学； 传感技术联合国家重点实验室；

【摘要】 本文介绍了一种基于EWOD效应的微液滴控制芯片,该芯片利用硅微加工工艺制作,以多晶硅作为电极和SiO2作为绝缘层。我们进行了基于EWOD效应的液滴控制实验,测试了制作的芯片对于微液滴的控制性能。结果表明,在电压小于80V的时候,接触角测量值基本和预测曲线吻合。实验中得到的液滴最快移动平均速度为6.98mm/s。实现了液滴的四个基本操作动作:产生、合并、输运、分割。更多还原

【Abstract】 In this paper, a droplet operating chip based on Electrowetting on Dielectrics(EWOD) was described. The chip was fabricated by silicon micromachining with polycrystalline silicon as electrodes and silicon dioxide as dielectric. We implemented droplet controlling based on EWOD and tested the controllability performance of the chip. The experimental results show that the contact angles of droplets were closer to the theoretical predictions within 80V AC. The largest speed of the droplet movement was up to 6.98 mm/s, and the droplet fundamental manipulations such as creating, transporting, cutting, merging of droplets were achieved by EWOD with computer aided control.更多还原