【作者】 郭强； 吴昊； 刘建华； 李松梅； 于美；

【Author】 GUO Qiang, WU Hao, LIU Jian-hua, LI Song-mei, YU Mei (School of Materials Science and Engineering, Beihang University, Beijing 100191, China)

【机构】 北京航空航天大学材料科学与工程学院；

【摘要】 对不锈钢基体上电泳沉积钛酸钡薄膜的工艺及其影响因素进行了研究。采用场发射扫描电镜、Zeta电位仪与金相显微镜、扫描电镜分别对钛酸钡颗粒与热处理前后的钛酸钡薄膜进行测试与观察,并通过钛酸钡薄膜的表面形貌和单位时间的沉积质量,获得了优化的电泳沉积工艺参数。结果表明,钛酸钡的颗粒度主要分布在100～400nm,且集中于200nm左右;经过2h、1150℃热处理后的钛酸钡薄膜比较致密、平整,1150℃热处理的电泳沉积钛酸钡薄膜在100Hz与100kHz、室温下的介电常数分别约为5491和65。更多还原

【Abstract】 The deposition of BaTiO3 film on stainless steel was studied by using electrophoretic deposition. The effects on processes of electrophoretic deposition BaTiO3 film were discussed. Field emission scanning electron microscope (FE-SEM), zeta potential measurement and optical microscope(OM), scanning electron microscope (SEM) was employed to observe the size of BaTiO3 particles and micro-morphology of BaTiO3 film before and after heat treatment, respectively. The preparation procedure was optimized by using micro-morphology evaluation and deposition weight method. It was showed that the size of the particles was mainly about between 100-400nm and intensely at about 200nm. It was indicated that BaTiO3 film was more homogeneous and compacter after the heat treatment at 1150℃ for 2h. The dielectric constant of BaTiO3 film at 1150℃ heat treatment was 5491 and 65 at the frequency of 100Hz and 100kHz in home temperature, respectively.更多还原