【作者】 孟长功； 王德和； 崔立山； 陶德宏； 杨大智；

【Author】 Meng Changgong Wang Dehe~+ Cui Lishan~+ Tao Dehong Yang Dazhi~+ (School of Chemical Engineering,Dalian University of Technology,Dalian,116012,China) (+Depatrment of Materials Engineering,Dalian University of Technology,Dalian,116024,China)

【机构】 大连理工大学化工学院； 大连理工大学材料工程系；

【摘要】 在NiTi形状记忆合金表面,利用合金中Ti元素作为Ti源,研究了水热条件下BaTiO₃、SrTiO₃和PbTiO₃压电陶瓷薄膜的原位制备工艺。采用水热化学法在120～200℃温度区间内、自生压力实现了陶瓷薄膜的原位制备。X射线衍射结果表明三种组成的薄膜均为立言钙钛矿结构;扫描电子显微镜观察表明薄膜具有较高的致密程度,表面粗糙度极小,晶粒尺寸分布在0.07～0.1μm左右的较窄范围内。断口形貌观察表明薄膜厚度约为1μm。制备薄膜的水热反应液中,溶液阴离子种类、阳离子浓度和酸度对薄膜的生成及晶粒尺寸有显著影响。力学性能测试结果表明薄膜与基体间有极强的结合力。更多还原

【Abstract】 The piezoelectric ceramic thin films of BaTiO₃ and PbTiO₃ were prepared on the surface of NiTi shape memory alloy by hydrothermal method. The in-situ preparations were conducted at temperatures between 120 and 200℃under saturated vapor pressures.The cubic perovskite structure of the films was proved by XRD technique,and SEM observation showed that the films were very dense and very smooth.The grain size was in the range of 0.07～0. 1μm and the size distribution was significantly narrow. The thickness of the films was about 1μm based on the cross-sectional micrograph observation.The experiments showed that the concentration of the cation,the kind of anion and the acifity of the solution were the determining factors of the formation and grain size of the fhin films.更多还原