【作者】 刘永胜； 张立同； 成来飞； 徐永东； 杨文彬；

【Author】 LIU Yong-sheng,ZHANG Li-tong,CHENG Lai-fei,XU Yong-dong Yang Wen-bin (National Key Laboratory of ThermoStructure Composite Materials, Northwestern Polytechnical University,Xi’an 710072)

【机构】 西北工业大学超高温结构复合材料国防科技重点实验室；

【摘要】 以BCl₃-C₃H₆-H₂为反应体系,采用LPCVD法制备BC_x材料。利用扫描电子显微镜（SEM）观察沉积产物的微观形貌,X射线光电子能谱（XPS）分析BC_x材料的元素含量和化学结构,结合化学反应过程,探讨了导致沉积产物形貌、成分和成键状态差异的原因。SEM结果表明,温度对沉积产物的形貌和生长速度具有显著影响。XPS结果表明,沉积温度既影响到BC_x材料内B、C元素含量,也影响到各元素的化学结构。更多还原

【Abstract】 BC_x has been prepared by LPCVD from BCl₃-C₃H₆-H₂ precursor mixture.The microstructure of the deposit was analyzed by SEM.The element content and the type of chemical structure of the deposited coating were studied by X-ray photoelectron spectroscopy.The inducements of the microstructure,component and various type of chemical structure were discussed with the consideration of chemical reaction processes.SEM results showed deposition temperature has a remarkable influence on the microstructure and deposition rate.XPS results showed deposition temperature affect not only the content of B,C in the BC_x but the type of chemical structure.更多还原