【作者】 陈大鹏； 焦彬彬； 李超波； 石莎莉； 史海涛； 程腾； 张青川； 伍小平；

【Author】 CHEN Da-peng~1 JIAO Bin-bin~1 LI Chao-bo~1 SHI Sha-li~1 SHI Hai-tao~2 CHENG Teng~2 ZHANG Qing-chuan~2 WU Xiao-ping~2 (1.Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China; 2.University of Science and Technology of China,Hefei 230027,China)

【机构】 中科院微电子研究所； 中国科学技术大学；

【摘要】 利用光力学效应设计研制了非制冷 MEMS 红外焦平面阵列及图像探测系统,提出并制作了新型间隔镀金的、无 Si 衬底的非制冷 MEMS 红外成像焦平面阵列,分析了 FPA 热响应时间、NETD、像元的一致性等问题,与光学检测系统共同组成红外成像系统,成功得到了室温背景下人体的热像。更多还原

【Abstract】 An uncooled MEMS infrared FPA device and imaging system were developed based on opto-mechanical effect and using MEMS fabrication technology.The fabrication process of the FPA was presented and the device was realized.A human’s thermal image was obtained using the infrared imaging system composed of the FPA and optical detecting system.The main performance parameter of the infrared imaging system were studied.更多还原