【作者】 田雪松； 刘金成； 李连江； 王骐；

【Author】 TIAN Xue-song, LIU Jin-cheng, LI Lian-jiang, WANG Qi (Institute of Opto-Electronics, Harbin Institute of Technology, Harbin 150001, China)

【机构】 哈尔滨工业大学光电子技术研究所；

【摘要】 VO2作为相变材料在激光防护领域有着广阔的应用前景,为了提高透过率,采用在红外波段透过率为70%的ZnSe做基片,用磁控溅射法制备了VO2薄膜。对不同条件下制备的VO2薄膜用X射线电子能谱仪(XPS)测试,并通过拟合来得到VO,V2O3,VO2和V2O5在薄膜中所占的比例。为提高4价钒的含量对薄膜进行了退火处理,根据薄膜中的钒氧的比例,采用了充氧加热退火,退火时间4h,退火温度450℃,退火真空度2.5×10-2Pa,氧气流量6.5sccm。4价钒含量提高到了接近60%,分析了退火对氧化钒薄膜中4价钒含量的影响。更多还原

【Abstract】 VO2 has wide use in the laser protection domain as phase transition material. They are deposited on ZnSe crystal substrate by magnetron sputtering methods, the films and the ZnSe bond not well, the substrate need special clean. Get the VO, V2O3 ,VO2 and V2O5 ‘s content by X-ray photoelectron spectroscopy(XPS) and guassian fitting. Increased the VO2 by annealing, heating insulate the atmosphere and fill the oxygen. The annealing time is 4 h, temperature is 450 ℃, vacuum is 2.5×10-2 Pa, oxygen flux is 6.5 sccm. The VO2 content increased to near 60%, the effect of annealing is analysed.更多还原