【作者】 陈伟； 姚汉民； 伍凡； 朋汉林； 吴时彬；

【Author】 CHEN Wei1,2, YAO Han-min1 , WU Fan1, PENG Han-lin1, WU Shi-bin1 (1.Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China; 2.Graduate School of the Chinese Academy of Sciences, Beijing 100039, China)

【机构】 中国科学院光电技术研究所；

【摘要】 光学元件加工质量的检测和评价是保证整个光学系统安全、正常运行的关键。波前功率谱密度(Power Spectral Density,PSD)能给出光学表面的空间频谱分布,反映高精度光学元件加工质量的特殊要求。在总结现有功率谱密度指标基础上,提出由于圆形口径的旋转对称性,可以采用径向波前功率谱密度来表征圆形口径光学元件波前频谱分布特征的方法,并给出了采用三坐标仪作为测试仪器测量圆形口径光学元件的波前功率谱密度时相应的数值计算方法。更多还原

【Abstract】 As the key of supplying the safe and normal running of the whole optical system, it is important to test and evaluate the quality of optical components. The wavefront power spectral density (PSD) can give the spatial frequency distribution of wavefront aberration and specify the optical components. Based on summarizing the existing PSD specification, one dimension radial PSD be used for specification the character of the spatial frequency distribution of wavefront aberration about the circular optical surfaces is advanced, its calculation about PSD in testing circular optical surface with coordinate measure machine are explored in this article.更多还原