【作者】 赵明皞； 姚利盼； 张科；

【Author】 Zhao Minghao Yao Lipan Zhang Ke (Department of Engineering Mechanics,Zhengzhou University,Zhengzhou,Henan,China)

【机构】 郑州大学 工程力学系；

【摘要】 利用有限元方法及商用软件ANSYS,模拟薄膜/基体系统的楔形压头压痕脱层试验中的薄膜变形行为,研究了压头楔形角、压入深度、薄膜弹性模量以及薄膜屈服应力等参数对薄膜压痕应力分布的影响,给出了加载压痕应力计算公式。更多还原

【Abstract】 The indentation stresses in thin films during indentation-induced delamination test of film/substrate systems by using a micro-wedge indenter are analyzed by use of Finite Element Method (FEM) and commercial software ANSYS for different parameters of wedge angle,penetration depth,film thickness,delaminafion size,Young’s modulus and yield stress of the indented film.The loading indentation stresses are defined and analyzed.Empirical formulae of indentation stresses are obtained from the numerical results of FEM.更多还原