【作者】 伊福廷； 张菊芳； 侯凤杰；

【机构】 中科院高能物理研究所；

【摘要】 金属微孔在许多领域内有着巨大的需求,电火花、激光打孔、化学腐蚀及光刻等技术被开发用于各种需求的金属微孔加工。迷你雾化器产品需要有一定锥度的金属微孔片,满足该产品的需要,利用光刻和电镀技术完成了该雾化器特殊金属微孔结构的制造。该方法加工的金属片厚50μm,微孔尺寸5μm,分布均匀,雾化颗粒小,雾化效果好,满足了微孔雾化器的特殊需要。更多还原

【Abstract】 Metal micro holes are applied in many fields with increasing require,and many methods,such as EDM,pulse laser,mechanical etching and UV lithography,have been developed to make metal micro holes for different needs. The miniature air humidifier just needs hole arrays of metal foil with taper section. UV lithography and electroplating technologies are used to fabricate the metal holes specially shaped with taper for the purpose. The metal foils of uniformity hole arrays have been fabricated with the thickness of 50μm,the hole size of 5μm,and meet the need to produce mist with very small size.更多还原