【作者】 金仁成； 陈涛； 张五金； 唐祯安；

【Author】 JIN Ren-cheng~a CHEN Tao~a ZHANG Wu-jin~b TANG Zhen-an~a (a.Key Laboratory for Micro/Nano Technology and System of Liaoning Province; b.Key Laboratory for Precision & Non Traditional Machining of Ministry of Education,Dalian University of Technology,Dalian 116023,China)

【机构】 大连理工大学辽宁省微纳米技术及系统工程重点实验室； 大连理工大学精密与特种加工教育部重点实验室；

【摘要】 针对微热板式微气压传感器的动、静态性能测试,建立了一套保持真空度稳定的控制系统。参考 MATLAB 的仿真结果,分别采用模糊控制与模糊 PID 控制算法设计出控制器,对传感器测试系统的真空度进行了实时控制研究,探讨并分析了真空度动态平衡的控制问题。结果显示,调整系统控制量的模糊 PID 控制稳态误差小、鲁棒性比较好,可以有效地对测试环境进行真空度调节和设置,能够解决传感器所需气压测试环境10～1000Pa 的实时气压控制问题。更多还原

【Abstract】 Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate,an automatic control system were established,which could maintain steady vacuum degree.Through the simulation results based on MATLAB,Fuzzy control and Fuzzy PID control algorithm were applied respectively to design the controller.The real-time control study on the vacuum degree of micro gas pressure sensor testing system was carried out,and the control problems of vacuum degree dynamic equilibrium were discussed and analyzed.The results show that fuzzy PID control based on adjusting system control quantity has less steady-state er- rors and better robust,which can regulate and set the vacuum degree of testing environment ef- fectively and solve real-time gas pressure control of the 10～1000Pa vacuum testing environment for sensor.更多还原