【作者】 胡杰； 薛晨阳； 张文栋； 熊继军； 张斌珍；

【Author】 HU Jie XUE Chen-yang ZHANG Wen-dong XIONG Ji-jun ZHANG Bin-zhen (National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China)

【机构】 中北大学电子测试技术国家重点实验室；

【摘要】 研究了一种新型的 GaAs 基压阻式共振隧穿微加速度计结构。该微加速度计的压敏元件采用 AlAs/In_0.1Ga_0.9As 双势垒共振隧穿纳米薄膜结构。加速度计的压敏元件和悬臂梁的加工分别利用空气桥工艺和控制孔工艺。对加工出来的加速度计结构进行振动台实验,初步测得传感器的灵敏度为7．6 mV/g,线性度为0．16%。更多还原

【Abstract】 A novel GaAs piezoresistive accelerometer based on resonant tunneling structure was presented.The sensitive unit was made of AlAs/In_0.1Ga_0.9As double barriers resonant tunneling thin film.The sensing unit and cantilever beams were successfully fabricated by double air bridg- es process and control hole process separately.The sensitivity of 7.6 mV/g and the linearty of 0.16% were measured in the vibration experiment.更多还原