【作者】 崔金强； 姜澄宇； 苑伟政； 常洪龙； 蒋庆华；

【Author】 CUI Jin-qiang JIANG Cheng-yu YUAN Wei-zheng CHANG Hong-long JIANG Qing-hua (Micro and Nano Electro-Mechanical Systems Laboratory,Northwestern Polytechnical University,Xi’an 710072,China)

【机构】 西北工业大学陕西省微/纳米系统重点实验室；

【摘要】 针对扭摆式加速度计的结构特点,为了有效利用硅片面积和提高质量块质量,设计了一种新型挠性轴内置于质量块的扭摆式加速度计,该结构具有检测电极和力反馈电极。根据结构设计参数,推导出中心敏感电容、等效质量、机械灵敏度的参数表达式。利用扭摆加速度计的数学模型,建立了加速度计表头系统级模型,并结合接口电路进行闭环整体仿真,调整校正环节参数,得到闭环系统性能指标。最后进行初步开环测试,测得加速度计的灵敏度为33 mV/g,非线性度2．29%。更多还原

【Abstract】 A novel Z-axis accelerometer with its torsion bars inside the sense element was presen- ted,easy to form the asymmetric mass and achieve maximum usage of the die.The sensor was fab- ricated using ordinary bulk micromachining process.It has sensing electrodes and force-feedback electrodes.The behavior of the sensor is modeled according to its mathematic principles,enabling the co-simulation with the interface circuit in a close-loop mode.The open loop mode test shows a sensitivity of 33 mV/g and a nonlinearity of 2.29%.更多还原