【作者】 徐从裕； 余晓芬；

【Author】 Xu Congyu Yu Xiaofen (School of Instrument Science and Opto—Electronic Engineering,Hefei University of Technology,Hefei 230009,China)

【机构】 合肥工业大学仪器科学与光电工程学院；

【摘要】 提出了光栅信号快速采样与精确测量相结合的光栅纳米测量方法,给出了在高速测量条件下的光栅纳米测量的细分算法、信号快速采样和数据处理。测试结果表明,测量速度与光栅细分倍数无关,当选用光栅栅距为20 mm 的光栅尺,在2000 000倍的细分数下,能够实现小于1nm 的有效测量分辨率和每光栅周期仅采样10个点的测量速度。更多还原

【Abstract】 A method of grating nanometer measurement based on the combination of high speed sampling and high precision measurement is proposed in this paper.The subdivision’s algorithm,high speed sam- pling and data process for grating nanometer measurement at high measuring speed are presented.The test results indicate that the measuring speed is not determined by the grating subdivision’s times,when grating of 20 mm pitch and 2 000 000 subdivisioffs times are adopted,the less than 1nm resolution and the measur- ing speed of 10 sampling points in a period of grating signals are realized.更多还原