【作者】 吴朔； 沙定国； 林家明； 周桃庚； 陈凌峰； 聂亮；

【Author】 Wu Shuo, Sha Dingguo, Lin Jiaming, Zhou Taogeng, Chen Lingfeng, Nie Liang(Department of Photonic engineering, Beijing Institute of Technology, Beijing 10081,China.)

【机构】 北京理工大学光电工程系；

【摘要】 根据单光纤点衍射干涉仪方案构建了一个测量凹球面面形的实验光路对一样品进行测量。经过精密调整获得干涉图并用CCD采集后输入计算机,通过对干涉图的处理获取被检波面的面形误差,用Zernike多项式进行了波面拟合。干涉图像处理结果能反映出被测镜面形误差分布,与Zygo干涉仪的测量结果基本一致。最后分析了设计与实验中存在的问题提出了有针对性的改进方案。更多还原

【Abstract】 An advanced fiber point diffraction interferometer (FPDI) has been developed. A concave spherical mirror was measured by experimental system. The interferograms were collected by CCD and analyzed in computer. The measured surface was successfully fitted with Zernike polynomial. The interferograms processing result are basically the same as the result from Zygo digital wave front interferometer. Finally the problems of this experiment were discussed.更多还原