【作者】 周飞； 王远； 刘峰； 孟月东； 戴振东； 任兆杏；

【Author】 Zhou Fei~(a*) Wang Yuan~a Liu Feng~b Meng Yuedong~b Dai Zhendong~a Ren Zhaoxing~b a:Institute of Bio-inspired Structure and Surface Engineering,Academy of Frontier Science,Nanjing University of Aeronautics and Astronautics,Nanjing Jiangsu 210016; b:Institute of Plasma Physics,Chinese Academy of Sciences,Hefei,Anhui.230031,P.R.China

【机构】 南京航空航天大学高新技术研究院仿生结构及材料防护研究所； 中国科学院等离子体物理研究所；

【摘要】 在2A12铝合金表面利用微弧氧化技术制备 Al₂O₃薄膜及采用射频磁控溅射技术在氧化铝陶瓷膜表面沉积 CrN 薄膜。用 X 射线衍射仪分析了薄膜的相构成,用涡流测厚仪测量了膜层的厚度,用纳米压痕仪测定薄膜的纳米硬度。利用微摩擦磨损试验机研究 Al₂O₃薄膜及 Al₂O₃/CrN 多层薄膜与 Si₃N₄球在水润滑下的摩擦磨损特性,用非接触表面三维形貌仪测量了薄膜的磨损体积,最后用扫描电镜观察了磨痕的表面形貌。实验结果表明：Al₂O₃薄膜主要由α-Al₂O₃和γ-Al₂O₃相组成,膜层最高纳米硬度12GPa。而 CrN 薄膜主要由单质 Cr 相、Cr₂N 相和 CrN 相组成,膜层最高纳米硬度34GPa。水润滑时,A1₂O₃薄膜/Si₃N₄摩擦副的摩擦因子随法向载荷和滑行速度的增大分别从0．69和0．67下降到0．65；磨损率则分别从3．84×10^-5mm³/N．m 和2．89×10^-5mm³/N．m 增加到 4．47×10^-5mm³/N．m。对于 A1₂O₃-CrN/Si₃N₄摩擦副的水润滑来说,随法向载荷和滑行速度的增大,摩擦因子从0．58降低到0．36,其磨损率从1．09×10^-5mm³/N．m增大到3．16×10^-5mm³/N．m。微观分析表明：Al₂O₃薄膜主要发生了摩擦化学磨损和疲劳磨损,而 Al₂O₃/CrN 多层薄膜主要发生摩擦化学磨损和 CrN 薄膜的剥落。在相同的摩擦环境和实验参数下,单层氧化铝薄膜的摩擦因子和磨损率都高于 A1₂O₃/CrN 多层薄膜的,这表明 CrN 薄膜有利于改善 Al 合金表面微弧氧化陶瓷薄膜的水润滑性能。更多还原

【Abstract】 Al₂O₃ coatings were prepared by Micro-arc oxidation（MAO）technique on 2Al2 Al alloy,and CrN coatings were deposited on Al₂O₃ coatings by using reactive radio frequency magnetron sputtering technique.The phase structure of coatings was analyzed using X-ray diffraction,their thickness was measured by using MINITEST1100 equipment,and their nano-hardness was determined by using nano-indentation test.The friction and wear properties of Al₂O₃ coatings and Al₂O₃/CrN multilayer coatings sliding against silicon nitride ceramic ball were camed out under water-lubricated conditions by using tribo-meters.The wear volumes of coatings were measured using non-contact surface profilometer,and the worn surface of coatings was observed using scanning electron microscope（SEM）.The results show that the alumina ceramic coating on 2Al₂ Al alloy was mainly composed of ct-Al₂O₃ and γ-Al₂O₃ phase,and its nano-hardness was 12GPa,while the CrN coatings were composed of Cr,Cr₂N and CrN and their nano-hardness was 34GPa.Under water-lubricated condition,with an increase in normal load and sliding speed,the friction coefficient of Al₂O₃ coatings/Si₃N₄ tribo-pair decreased from 0.69 and 0.67 to 0.65 respectively,and the specific wear rate of Al₂O₃ coatings increases from 3.84x10^-5mm³/N.m anti 2.89×10^-5mm³/N.m to 4.47×10^-5mm³/N.m respectively.Whereas for the Al₂O₃-CrN coatings/Si₃N₄ tribo-pair in water,the friction coefficient decreased from 0.58 to 0.36,and the specific wear rate of coatings increased from 1.09×10^-5mm³/N.m to 3.16×l0^-5mm³/N.m.The mico-analysis indicated that the wear mechanism of the Al₂O₃ coatings was mainly tribo-chemical wear and fatigue wear,while the wear mechanism of CrN coatings was the tribo-chemical wear and the coatings’flaking.Under the same experimental conditions,the friction coefficient and specific wear rate of Al₂O₃ coatings were all larger than those of Al₂O₃/CrN multilayer coatings.This indicated that the CrN coatings could improve the water-lubricative properties of micro-arc oxidation ceramic coating on aluminum alloys.更多还原