【作者】 韦其红； 赵振华； 付兴华； 侯文萍；

【Author】 Wei Qihong Zhao Zhenhua Fu Xinghua Hou Wenping (Department of Materials Science and Engineering, Jinan University, Jinan 250022) (The Exploitation Service Center of Materials of City Construction, Jinan 250032)

【机构】 济南大学材料科学与工程学院； 济南市城建材料开发服务中心；

【摘要】 用醋酸盐和钛酸酯为原料,采用Sol-Gel工艺在Pt／TiO2/SiO2/Si基片上制备出Ba0.5Sr0.5TiO3(BST)铁电薄膜,然后在650-800℃下对BST薄膜进行退火,研究退火温度对钛酸锶钡铁电薄膜的影响。X射线衍射分析表明:退火温度在750℃以上时,BST薄膜转变成较为完整的ABO3型钙钛矿结构;SEM分析表明:750℃热处理的薄膜颗粒较大,且颗粒生长较好;阻抗分析仪测试表明:750℃退火处理的薄膜介电性能最佳;TEM分析表明:750℃晶粒发育完善、清晰,晶粒与晶粒之间比较紧密,且存在微畴区域。更多还原

【Abstract】 Barium strontium titanate films with higher properties have been obtained by sol-gel processing on Pt/TiO2/SiO2/Si substrate using barium acetate, strontium acetate and titanium-tetrabutoxide as starting materials. X-rays diffraction revealed that at 750℃ the BST films had crystallized into ABO3 perovskite phase. Analysis indicated that large,uniform grains, and the best dielectric properties were obtained at 750℃. Analysis by TEM revealed that grains were crystallized better,close to each other, and micro-domains were detected at 750℃.更多还原