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透明导电SrCu2O2薄膜的制备技术与生长机制的探讨
Study on Deposition Methods and Growth Mechanism of SrCu2O2 Transparent Conductive Oxides Films
【作者】 方亮; 高岭; 董建新; 彭丽萍; 刘高斌; 汪立文;
【Author】 FANG Liang~(1,2) GAO Ling DONG Jianxin~1 PENG Liping~1 LIU Gaobin~1 WANG Liwen~1 (1 Department of Applied Physics,Chongqing University,Chongqing 400044;2 Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China,Chongqing University,Chongqing 400044)
【机构】 重庆大学数理学院应用物理系;
【摘要】 SrCu2O2(SCO)是一种新型可掺杂为 p 型导电的直接带隙透明氧化物半导体,其沉积温度低,基于 p- SrCu2O2和 n-ZnO 薄膜已经成功制备了异质结透明近紫外发光二极管,预示着其广阔的应用前景。对 SCO 薄膜的几种制备技术的特点进行了详细说明,结合“域匹配外延”的观点讨论了 SCO 在 ZnO 上的外延关系,并提出了 SCO 膜生长机理方面需要解决的问题。
【Abstract】 SrCu2O2(SCO)is a new kind of p-type TCO with a large direct band gap and can be prepared at low temperature.Based on p-SrCu2 O2 and n-ZnO films,hetero-junctions transparent near-UV LEDS have been success- fully developed,indicating its wide application prospect.In this paper,the characteristic of several deposition methods of SCO thin film are descript in detail and the epitaxial relationship between SCO and ZnO are discussed based on the i- dea of“domain match epitaxy”,and the questions need to solve in the hetero-epitaxy growth of SCO are proposed.
- 【会议录名称】 2007高技术新材料产业发展研讨会暨《材料导报》编委会年会论文集
- 【会议名称】2007高技术新材料产业发展研讨会暨《材料导报》编委会年会
- 【会议时间】2007-05
- 【会议地点】中国四川成都
- 【分类号】TB43;O484.1
- 【主办单位】《材料导报》杂志社、《材料导报》第五届编委会