节点文献

Cu(In,Ga)3Se5薄膜的结构及其缺陷研究

Ga and Film Microstructures of Quaternary Ordered Defect Compounds Cu(In,Ga)3Se5

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 徐传明许小亮谢家纯徐军杨晓杰冯叶黄文浩刘洪图

【Author】 Xu Chuanming ,Xu Xiaoliang,Xie Jiachun,Xu Jun,Yang Xiaojie,Feng Ye,Huang Wenhao and Liu Hongtu Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, 230027, China; Structure Research Laboratory, University of Science and Technology of China, Academic Sinica, Hefei, 230026, China; Department of Physics, University of Science and Technology of China, Hefei ,230026, China

【机构】 中国科学技术大学精密机械与精密仪器系中国科学院中国科学技术大学结构分析重点实验室中国科学技术大学物理系

【摘要】 讨论了Ga含量对四元有序缺陷化合物Cu(In,Ga)3Se5薄膜结构的影响。Ga含量的增加引起晶格扭曲系数η近似按抛物线形式增加,而其晶格常数a与c呈线性减小趋势,同时(112),(220)/(204)等主衍射峰的位置和强度呈现显著的改变。而样品厚度的改变会导致薄膜中存在不同的内应力,最终对薄膜的结构产生了显著影响。

【Abstract】 Quaternary ordered-defect compounds Cu(In,Ga)3Se5 films were grown by RF magnetron sputtering on glass substrate. Influence of Ga content on microstructures of the film was studied with X-ray diffraction.The results show that variations in Ga content significantly affect the lattice parameters,including its tetragonal distortion coefficient η and its lattice constants: a and c.For instance,as Ga content increases, η approximately varies in a parabola way; whereas the lattice constants, a and c ,linearly decrease. Moreover, the intensity and 2θ of the main diffraction peaks,such as (112),and (220)/(204)peaks,drastically change.Interesting finding is that changes in the film thickness considerably affect the non-uniform stress distribution, which in turn alters the microstructures of the films.

【基金】 安徽省自然科学基金(No.0046506)
  • 【会议录名称】 全国薄膜技术学术研讨会论文集
  • 【会议名称】全国薄膜技术学术研讨会
  • 【会议时间】2006-09
  • 【会议地点】中国北京
  • 【分类号】TB383.2
  • 【主办单位】中国真空学会
节点文献中: