【作者】 张迎新； 刘京南； 陈从颜；

【Author】 ZHANG Ying-xin, LIN Jing-nan, CHEN Cong-yan Department of automatic control, Southeast University, Nanjing 210096, China

【机构】 东南大学自动控制系；

【摘要】 文中介绍了基于差动光栅结构的精密直线定位原理和平面精密角度定位原理,分析了两光栅倾斜角对直线定位准确性的影响,分析了两光栅间隙对整个平面定位精度的影响,指出了在X-Y-θ平面定位系统中精密角度定位是关键,最后给出了实验系统的设计和X-Y-θ平面精密定位的实验结果。更多还原

【Abstract】 This text introduces the principles of Precise Aligner Position and Plane Precise Angle Position based on the structure of Differential Grating, After analyzing the influence of roll between two gratings on the accuracy of Aligner Position, and the influence of the gap between two gratings on the whole plane position accuracy, it is concluded that Precise Angle Position is the key to Plane Position System. The design of the Plane Precise Position experimental system is shown at the end of this text, as well as the test result of this system.更多还原