【作者】 李莺； 张卫华； 赵高扬；

【Author】 Li Ying, Zhang Wei-Hua. Zhao Gao-Yang Department of Material Science and Engineering,Xi’an University of Technology,Xi’an 710048

【机构】 西安理工大学材料科学与工程学院；

【摘要】 采用溶胶-凝胶工艺,以醋酸钡,氯化锶,钛酸丁酯为原料制备了Ba₀.8Sr₀.2TiO₃溶胶,利用提拉法在Pt/TiO₂/SiO₂/Si衬底上制备BST薄膜,采用XRD衍射分析仪系统研究了不同热处理条件下制备的BST薄膜的晶相结构。结果表明:热处理温度在600℃以上时,BST薄膜形成了较为完整的ABO₃钙钛矿结构,且随热处理温度升高,热处理时间的延长,晶体生长沿（110）的取向性越好,结晶状况明显改善。更多还原

【Abstract】 Ba0.8Sr0.2TiO3(BST) ferroelectric thin films were prepared by Sol-Gel processing using barium acetate, strontium chloride and titanium tetrabutoxide as precursor. The BST sol was coated on Pt/TiO2/SiO2/Si substrates using a dipping-coating process. X-ray diffraction has been utililzed to study the crystal structure of BST thin films treated at different annealing temperature. The results show that at 600℃ the BST thin film has already crystallized and nearly pure perovskite phase was obtained. It was found that increasing the annealing temperature and prolonging the annealing time, the orientation along the (110) direction is improved, the crystalline degree of BST thin film is also improved obviously.更多还原