【作者】 聂萌； 黄庆安； 李伟华；

【Author】 Nie Meng Huang Qing’an Li Weihua Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing,210096

【机构】 东南大学MEMS教育部重点实验室；

【摘要】 提出了一种新的泊松比在线测量方法,在用两端固支梁静电吸合模型提取薄膜等效弹性模量的基础上,根据薄膜的等效弹性模量、杨氏模量、泊松比之间的关系提取薄膜的泊松比。在确定的工艺条件下,选择多组尺寸的测试结构用Coventor Ware软件计算吸合电压值,分析不同梁长对提取等效弹性模量精度的影响,表明选择合适的梁长可得到具有较高精度的泊松比。更多还原

【Abstract】 A new method for in -situ measuring Poisson’s ratio was presented. Based on the electrostatically actuated model of fixed -fixed beam to extracting effective modulus of a membrane, Poisson’s ratio can be extracted according to the relation between effective modulus , Young’s modulus and Poisson’s ratio. Calculating pull- in voltages by Coventor Ware for sets of test structures with different dimensions under a certain process condition, analyzing the relation between test structure dimensions to measuring accuracy, it is shown that Poisson’s ratio can be extracted with high accuracy by selecting suitable lengths of the beams.更多还原