【作者】 闫永达； 孙涛； 董申；

【Author】 Yan Yongda Sun Tao Dong Shen Harbin Institute of Technology, Harbin, 150001

【机构】 哈尔滨工业大学；

【摘要】 为获得AFM金刚石微探针在纳米尺度上加工脆性材料的加工特性,在AFM系统上对单晶硅表面进行了刻划、加工实验。实验结果与宏观车削加工结果进行了对比,得出在纳米尺度上进行的加工属塑性城加工。采用AFM金刚石微探针加工硅表面的加工质量主要受材料残留高度和形成的切屑在已加工表面的粘结两个因素影响。验证了AFM作为一种加工工具,受其刻划方向的影响,可以很容易地实现纳米量级材料的去除,得到厚度为数个纳米的切屑。更多还原

【Abstract】 To achieve machining characteristics of brittle materials on the nanometer scale using an AFM diamond tip as the cutting tool, scratching tests and machining tests were carried out on the surface of monocrystal silicon based on AFM. Comparisons were performed between experimental results and the results obtained from the macro turning experiments. The conclusion that machining silicon on the nanometer scale belongs to plastic machining can be drawn. In addition, surface quality machined by the AFM diamond tip is mainly influenced by two factors: remained height of materials and adhesion of chips on the machined surface. Moreover, the fact that AFM, as a machining tool, influenced by its scratching directions, can remove materials on the nanometer scale and get chips with several nanometers in depth is verified.更多还原