节点文献
多级MEMS铁电制冷器有限元分析
Finite Element Analysis of Multi-layer MEMS Ferroelectric Microcoolers
【Author】 Shang Yonghong Li Yanqiu Zhang Qingtao Liu Shaobo Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080
【机构】 中国科学院电工研究所;
【摘要】 在试验的基础上,利用有限元方法建立数学模型,从理论上对多级MEMS铁电制冷器在不同工况下的温度场进行了研究。数值计算结果表明,所有制冷片同时工作时温降比交替工作时要大,在同工况下,层间加压有时间差有利于减弱温度波动,这对研究MEMS制冷器的结构及运行方式有重要意义。
【Abstract】 On the basis of experiments, the paper presented a mathematical model for using Finite Element method, as well as investigated the temperature field characteristics under diverse situations. The results indicate, the efficiency of temperature reduction is better when all ceramic slices are working in simultaneous mode vs. in alternative mode. Under simultaneous mode, to enhance the pressure among layers will reduce temperature fluctuation. This is important to further investigations on the mechanisms and operating modes of MEMS microcoolers.
【Key words】 MEMS; ferroelectric refrigeration; microcooler; PMNT; finite element method;
- 【会议录名称】 中国微米、纳米技术第七届学术会年会论文集(一)
- 【会议名称】中国微米、纳米技术第七届学术会年会
- 【会议时间】2005-08
- 【会议地点】中国大连
- 【分类号】TB651
- 【主办单位】中国机械工程学会