【作者】 尤国平； 田凌； 郝文涛；

【Author】 You Guoplng Tian Ling Hao Wentao Tsinghua University, Beijing, 100084

【机构】 清华大学；

【摘要】 针对MEMS设计的特点,在研究其设计过程和规律的基础上,提出一种MEMS集成化设计方法,该设计方法从方法论的角度探究了MEMS的最优设计问题。在集成化设计方法的基础上,研究MEMS工艺版图的三维重构和面向系统级仿真的宏模型构建方法,实现了MEMS集成化设计环境,有助于建立支持集成化设计的MEMS CAD软件系统。更多还原

【Abstract】 Based on the researches of the design processes and rules of MEMS, an integrated design methodology for MEMS was proposed. The methodology focused on the optimum design of MEMS. On the basis of the integrated design methodology, two key techniques(3D reconstruction of layouts and construction of macro-model) were deeply studied in order to realize the integrated design environment for MEMS. The paper helps the formalization of MEMS CAD software supporting the integrated design methodology for MEMS.更多还原