【作者】 李丽； 赵正平； 张志国； 吕苗；

【Author】 Li Li Zhao Zhengping Zhang Zhiguo lu MiaoHebei University of Technology,Tianjin,300130 The 13th Research Insitute,CETC, Shijiazhuang,050051

【机构】 河北工业大学； 中国电子科技集团公司第十三研究所；

【摘要】 提出了一种高Q值、宽调节范围的凹型结构微机械可变电容。它由4个(3对)极板构成,其中一对为电容极板,另外两对为控制极板。RF信号通过电容极板传输,而直流控制电压则施加在控制极板上。使用HFSS软件对该电容进行了结构仿真及优化,得到最大Q值为171(1.6GHz)。结构优化后,调节范围为15.6,并设计了该电容的工艺漉程,具有工艺简单、易与标准的IC电路集成等优点。更多还原

【Abstract】 A concave shape micromachined variable capacitor was presented which has high Q and wide tuning ranges. It consists of four (three pairs of) plates. One pair of them is used as capacitor plates,and the other two are used as control plates. RF signals pass through the capacitor plates while DC control voltage is applied on the control plates. High Q and wide tuning ranges were derived through structural simulation and optimization with HFSS software, the former is about 171 at the frequency of 1. 6GHz and the latter is up to 15. 6. At last, we designed the processes of the capacitor which can be easily integrated with standard IC circuits.更多还原