【作者】 余隽； 唐祯安； 张凤田； 陈正豪； 王立鼎；

【Author】 Yu Jun Tang Zhen’an Zhang Fengtian Chan C H Philip Wang LidingDalian University of Technology, Dalian. 116024 HongKong University of Science and Technology, Hong Kong

【机构】 大连理工大学； 香港科技大学；

【摘要】 设计并加工了一种新型的微量热计,该微量热计的制备采用半导体加工工艺和表面微机械加工技术。与体硅加工的微量热计相比,具有成品率高和器件尺寸控制准确的优点。在真空环境中,该微量热计在5.5mW的加热功率下,中心温度从300K升至400K只需约0.5ms,升温速率达2×105K/s。针对微量热计热质小、升温快等特点,引入了脉冲扫描量热法来测量薄膜的热容。测量了厚度为(430±20)nm的Al薄膜从300K到420K的热容曲线,该薄膜的热客在室温附近为9.2nJ/K。若薄膜的密度值取2700kg/m3,则该Al薄膜的比热容在室温下约为1096.8J/(kg·K),比Al体材料的比热容值900J/(kg·K)增加了约21.9%,表现出金属蚋米晶体的热容增强效应。更多还原

【Abstract】 A microcalorimeter was fabricated with combination of 1C technology and silicon surface micro -fabrication technology. The device has good manufacturing yield and precisely controlled pattern size compared to the bulk micro-machined one. In vacuum with heating power of 5. 5mW, the temperature of the micro calorimeter rises from 300K to 400K in 0. 5ms, and the heating rate is up to 2×05K/s. According to the characteristics of small thermal mass and fast heating rate of the microcalorimeter, pulse calorimetry was introduced to measure the heat capacity of thin films. Heat capacity of Al thin film with thickness of (430±20)nm was measured from 300K to 420K. Result shows that heat capacity of the Al film is 9. 2nJ/K at room temperature. If the density of the film is 2700kg/m3, then the specific heat capacity of the film is about 1096. 8J/(kg·K). It is 21. 9% larger than the specific heat capacity of the bulk Al of 900J/(kg·K), which indicates the enhancement of specific heat capacity of nanocrystalline metals.更多还原