【作者】 王奇； 赵湛； 曾欢欢； 方震； 张博军；

【Author】 Wang Qi Zhao Zhan Zeng Huanhuan Fang Zhen Zhang BojunState Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, 100080 Graduate School,Chinese Academy of Sciences, Beijing, 100039

【机构】 中国科学院电子学研究所传感技术国家重点实验室；

【摘要】 介绍了一种具有新结构的温湿压集成传感器,分别采用了热敏电阻法测量温度、导热检测法检测湿度、应变电阻法检测压力。这种集成传感器主要是采用硅、氮化硅和铂金为材料制作的。测量温度和湿度的铂金电阻都在悬空氮化硅薄膜上,测量压力的压力敏感膜也是由悬空氮化硅薄膜形成的。这种传感器与一般的集成传感器相比,具有结构简单、工艺简单、精度高的优点。更多还原

【Abstract】 A new structure integrated sensor of temperature, humidity and pressure had been designed and fabricated, which employed Pt resistance to measure temperature, thermal conductivity principle to measure humidity and strain to measure pressure. The main materials of the integrated sensor are Si, Si3N4 and Pt. The Pt resistance for temperature and humidity is on the Si3N4 membrane with micro air bridge structure and the pressure sensitive membrane is also consisted of Si3N4. The sensor has advantages of simple structure, easy processing and high accuracy compared to normal sensors.更多还原