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一种新型非对称电极的非接触压电微马达

A New Type of Non-contact Piezoelectric Micromotor Based on Non-symmetry Electrode

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【作者】 杨斌刘景全陈迪蔡炳初

【Author】 Yang Bin Liu Jingquan Chen Di Cai Bingchu Shanghai Jiaotong University,Shanghai, 200030

【机构】 上海交通大学微纳科学技术研究院

【摘要】 提出一种基于非对称电极驱动的非接触压电微马达。圆盘型压电陶瓷作为激励源以产生用向行波。研究了该电极激励行波的条件。根据理论分析,设计了马达样机进,行了实验。并比较了对称电极和非对称电极两种情况下转子转速与频率的关系,得知非对称电极驱动明显提高了压电微马达的转速。

【Abstract】 A new type of non-contact piezoelectric micromotor based on non -symmetry electrode was put out for the first time. The disk -type piezoelectric ceramics were used as exciting supply to obtain circumferential traveling -wave. The principle of traveling -wave driving by non -symmetry electrode was studied systematically. Based on these theories,a prototype of micromotor was designed and fabricated. The relationship between the revolution speed and frequency was a great contrast between symmetry -electrode and non -symmetry -electrode driving. From these results, the revolution speed of the rotors is obviously improved by non -symmetry -electrode driving.

【基金】 国家自然科学基金资助项目(50205017)
  • 【会议录名称】 中国微米、纳米技术第七届学术会年会论文集(一)
  • 【会议名称】中国微米、纳米技术第七届学术会年会
  • 【会议时间】2005-08
  • 【会议地点】中国大连
  • 【分类号】TM383
  • 【主办单位】中国机械工程学会
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