【作者】 张国威； 刘晓为； 陈伟平； 倪鹤南； 王喜莲；

【Author】 Zhang Guowei Liu Xiaowei Chen Weiping Ni Henan Wang Xilian Harbin Institute of Technology, Harbin, 150001

【机构】 哈尔滨工业大学；

【摘要】 依据扩散口/喷嘴理论,设计了不同几何尺寸无阀微泵的扩散口/喷嘴光刘掩模版图,采用硅平面工艺、各向异性腐蚀及削角补偿等技术,制作出了多种无阀微泵。对无阀微泵泵压及流量进行了实验研究,结果表明:泵压与流量均呈现反比关系;扩散口/喷嘴的张角为8°时微泵效率最高;扩散口/喷嘴长度为2500μm、扩散口/喷嘴的窄口宽度为150μm、腐蚀深度为150μm时,无阀微泵的最大泵压和流量分别为14.9kPa和558μL/min。更多还原

【Abstract】 The valveless micropumps with various geometric structures were designed according to the diffuser/noz-zle theory. A lot of valveless micropumps were fabricated by IC and MEMS technology including anisotropic etching and anodic bonding. The pressure and flow rate of pumps were researched, and the results show that the pump pressure increase in inverse proportion to flow rate. The pressure and flow rate of micropump achieve 14. 9kPa and 558μL/min respectively, while the angle, length, breadth and etching depth of diffuser/nozzle is 8°, 2400μm, 150μm and 150μm respectively.更多还原