【作者】 朱常兴； 李勇； 陈旭鹏； 叶雄英； 周兆英；

【Author】 Zhu Changxing Li Yong Chen Xupeng Ye Xiongying Zhou ZhaoyingState Key Laboratory of Precision Measurement Technology and Instruments ,Tsinghua University, Beijing, 100084

【机构】 清华大学精密测试技术及仪器国家重点实验室；

【摘要】 介绍了一种微小型电磁驱动常闲微流体控制阀的设计和制作方法,该阀采用MEMS工艺与精密加工相结合的方法制作微型阀的核心部件——电磁致动器和阀芯,实现了微小流量控制和结构小型化,并通过实验对微型阀进行了特性测量。该阀具有工作电压小(2-3V)、功耗低、结构尺寸小(体积为3.0cm3)、流量小(0.3MPa时体积流量小于0.23mL/s)等特点。更多还原

【Abstract】 This paper described design and fabrication of a miniature valve driven by an electromagnetic actuator. The valve was composed of a valve shell, a valve core and an electromagnetic actuator. The key parts of the valve were electromagnetic actuator and valve core which were fabricated by precision machining and bulk -silicon micormachining. Control of the valve was achieved by the electromagnetic actuator. Experimental results show that the valve can control small flow. This valve has advantages as low driving voltage, small volume, low power consumption and so on.更多还原