【作者】 王鸣； 郭冬梅；

【Author】 WANG Ming GUO DongmeiNanjing Normal University, College of Physical Science and Technology, 210097

【机构】 南京师范大学物理科学与技术学院；

【摘要】 提出了一种新型的基于修正相移技术的自混合干涉仪,由置于外腔中的电光晶体对激光束的相位进行峰峰值为π的三角波调制。激光束的相位解调由五步Schwider-Hariharan算法结合特定的采样技术得到。应用这种新型的自混合干涉仪对高精度的商用PZT的微小运动进行了重构,得到了纳米级的位移测量精度。该干涉仪的测量范围主要依赖于电光晶体的最大调制频率和D/A卡的最大采样频率。更多还原

【Abstract】 A new self-mixing interferometry based on the modified phase shifting technique is presented. Triangular phase modulation of the laser beam with amplitude (peak to peak)πis obtained by an electro-opitc modulator (EOM) in the external cavity. The phase of the interference signal is calculated by five-step Schwider-Hariharan algorithm combined with a special sampling technique. The new interferometer is applied to reconstruct the micro-movement of a high-precision commercial PZT and a displacement measurement precision of a few nanometers can be obtained. The measurement range of the system mainly depends on the maximum operating frequency of EOM and the maximum sampling rate of A/D converter更多还原